111 Fluorides sputtering source
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Fluorides

Aluminum Fluoride(AlF3)
Barium Fluoride(BaF2)
Cerium Fluoride(CeF3)
Lanthanum Fluoride(LaF3)
Lithium Fluoride(LiF)
Magnesium Fluoride(MgF2)
Sodium Aluminum Fluoride(Na3AlF6)
Yttrium Fluoride(YF3)
Ytterbium Fluoride(YbF3)

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